JPS6328517Y2 - - Google Patents
Info
- Publication number
- JPS6328517Y2 JPS6328517Y2 JP1982112610U JP11261082U JPS6328517Y2 JP S6328517 Y2 JPS6328517 Y2 JP S6328517Y2 JP 1982112610 U JP1982112610 U JP 1982112610U JP 11261082 U JP11261082 U JP 11261082U JP S6328517 Y2 JPS6328517 Y2 JP S6328517Y2
- Authority
- JP
- Japan
- Prior art keywords
- insulator
- vacuum container
- container
- voltage
- high vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11261082U JPS5917552U (ja) | 1982-07-23 | 1982-07-23 | イオンビ−ム装置等における高圧導入碍子 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11261082U JPS5917552U (ja) | 1982-07-23 | 1982-07-23 | イオンビ−ム装置等における高圧導入碍子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5917552U JPS5917552U (ja) | 1984-02-02 |
JPS6328517Y2 true JPS6328517Y2 (en]) | 1988-08-01 |
Family
ID=30260996
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11261082U Granted JPS5917552U (ja) | 1982-07-23 | 1982-07-23 | イオンビ−ム装置等における高圧導入碍子 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5917552U (en]) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7303662B2 (en) | 2000-02-17 | 2007-12-04 | Applied Materials, Inc. | Contacts for electrochemical processing |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7478907B2 (ja) * | 2021-05-17 | 2024-05-07 | 株式会社日立ハイテク | 高電圧絶縁構造体、荷電粒子銃および荷電粒子ビーム装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5439974U (en]) * | 1977-08-24 | 1979-03-16 |
-
1982
- 1982-07-23 JP JP11261082U patent/JPS5917552U/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7303662B2 (en) | 2000-02-17 | 2007-12-04 | Applied Materials, Inc. | Contacts for electrochemical processing |
Also Published As
Publication number | Publication date |
---|---|
JPS5917552U (ja) | 1984-02-02 |
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